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Direct Contact-Area Computation for MEMS Using Real Topographic Surface Data
D. J. Dickrell, M. T. Dugger, M. A. Hamilton, and W. G. Sawyer
D. J. Dickrell, M. T. Dugger, M. A. Hamilton, and W. G. Sawyer
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Direct computation of interfacial contact area for
microelectromechanical-system applications was performed numerically
using the measured device surface topography and the
material hardness to define the flow stress of an individual element.
The simulation results compared well with the established
contact-area determination methods and also introduced new capabilities
that enabled the visualization of the spatial distribution
of contact spots to be computationally mapped and rendered
directly onto device surfaces.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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